Collection Detail—
Microlithography process technology for IC fabrication
| Pengarang | : | David J Elliott |
| Penerbit | : | New York : McGraw-Hill, 1986 |
| Halaman / Ilus. & Biblio. | : | xi, 378 p. / Bibl.; Graf.; Ill.; Ind.; Tab. |
| ISBN | : | 0-07-019304-5 |
| Subyek | : | MICROLITHOGRAPHY ELECTRONICS;INTEGRATED CIRCUITS |
| Edisi | : | |
| Editor | : | |
| Badan Korporasi | : | - |
| Seri / Volume / Jilid | : | / / |
| Supplemen | : | |
| Jumlah Dipinjam | : | 0 |
| No. | No. Barcode | No. Panggil | Status | Note | Location |
| 1 | 13064 | 621.3815 Ell m | Tersedia | Usakti - Kampus A - Gedung Syarief Thayeb (M) - Lantai 3 | |
| 2 | 13065 | 621.3815 Ell m | Tersedia | Usakti - Kampus A - Gedung Syarief Thayeb (M) - Lantai 3 |
